Self-benchmarking Guide for Cleanrooms: Metrics, Benchmarks, Actions

Publication Type

Report

Authors

Abstract

This guide is primarily intended for personnel who have responsibility for managing energy use in existing facilities - including facilities managers, energy managers, and their engineering consultants. Additionally, cleanroom planners and designers may also use the metrics and benchmarks described in this guide for goal-setting in new construction or major renovation.

Year of Publication

2009

Organization

Research Areas

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