Real-Time Ozone Detection Based on a Microfabricated Quartz Crystal Tuning Fork Sensor

Real-Time Ozone Detection Based on a Microfabricated Quartz Crystal Tuning Fork Sensor

TitleReal-Time Ozone Detection Based on a Microfabricated Quartz Crystal Tuning Fork Sensor
Publication TypeJournal Article
Year of Publication2009
AuthorsRui Wang, Francis Tsow, Xuezhi Zhang, Jhih-Hong Peng, Erica S Forzani, Yongsheng Chen, John C Crittenden, Hugo Destaillats, Nongjian Tao
JournalSensors
Volume9
Issue7
Pagination5655-5663
Type of Articleepub
ISBN Number1424-8220
Keywordsenvironmental, epidemiological, ozone, population, real-time, selective, sensitive, sensor, wearable, wireless
Abstract

A chemical sensor for ozone based on an array of microfabricated tuning forks is described. The tuning forks are highly sensitive and stable, with low power consumption and cost. The selective detection is based on the specific reaction of the polymer with ozone. With amass detection limit of ~2 pg/mm2 and response time of 1 second, the sensor coated with apolymer sensing material can detect ppb-level ozone in air. The sensor is integrated into aminiaturized wearable device containing a detection circuit, filtration, battery and wirelesscommunication chip, which is ideal for personal and microenvironmental chemical exposuremonitoring.

DOI10.3390/s90705655
LBNL Report Number

LBNL-2821E